Glancing angle deposition of thin films : engineering the nanoscale /

• Main Author: Hawkeye, Matthew M.
• Other Authors: Taschuk, Michael T., Brett, Michael J.
• Format: eBook
• Language: English
• Published: Chichester, West Sussex, United Kingdom : Wiley, [2014]
• Series: Wiley series in materials for electronic and optoelectronic applications.
• Subjects: Nanotechnology.; Chemical vapor deposition.; Nanoelectromechanical systems > Design and construction.; TECHNOLOGY & ENGINEERING / Mechanical; Electronic books.
• Physical Description: 1 online resource.
• Bibliography: Includes bibliographical references and index.
• ISBN: 9781118847336 (ePub); 1118847334 (ePub); 9781118847329 (Adobe PDF); 1118847326 (Adobe PDF); 9781118847510 (electronic bk.); 1118847512 (electronic bk.); 1118847563; 9781118847565
• DOI: 10.1002/9781118847510