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02558nam a2200661 4500 |
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ocn881064962 |
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OCoLC |
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20170124071736.8 |
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m o d |
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140604s2014 enk ob 001 0 eng |
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|a 2014022002
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| 019 |
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|a 961648667
|a 962620808
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|a 9781118847336 (ePub)
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|a 1118847334 (ePub)
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|a 9781118847329 (Adobe PDF)
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|a 1118847326 (Adobe PDF)
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|z 9781118847565 (cloth)
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|a 9781118847510 (electronic bk.)
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|a 9781118847565
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|z (OCoLC)961648667
|z (OCoLC)962620808
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|2 bisacsh
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0 |
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|a 621.3815/2
|2 23
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| 049 |
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|a MAIN
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1 |
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|a Hawkeye, Matthew M.
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1 |
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|a Glancing angle deposition of thin films :
|b engineering the nanoscale /
|c Matthew M. Hawkeye, Michael T. Taschuk, Michael J. Brett, NRC National Institute for Nanotechnology.
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| 264 |
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1 |
|a Chichester, West Sussex, United Kingdom :
|b Wiley,
|c [2014]
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| 300 |
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|a 1 online resource.
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| 336 |
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|a text
|2 rdacontent
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| 337 |
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|a computer
|2 rdamedia
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| 338 |
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|a online resource
|2 rdacarrier
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| 490 |
1 |
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|a Wiley series in materials for electronic and optoelectronic applications
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| 504 |
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|a Includes bibliographical references and index.
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| 588 |
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|a Description based on print version record and CIP data provided by publisher.
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| 650 |
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|a Nanotechnology.
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| 650 |
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|a Chemical vapor deposition.
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| 650 |
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|a Nanoelectromechanical systems
|x Design and construction.
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| 650 |
|
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|a TECHNOLOGY & ENGINEERING / Mechanical
|2 bisacsh
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| 655 |
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4 |
|a Electronic books.
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| 655 |
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0 |
|a Electronic books.
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| 700 |
1 |
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|a Taschuk, Michael T.
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| 700 |
1 |
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|a Brett, Michael J.
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| 776 |
0 |
8 |
|i Print version:
|a Hawkeye, Matthew M.
|t Glancing angle deposition of thin films
|d Chichester, West Sussex, United Kingdom : John Wiley & Sons Inc., [2014]
|z 9781118847565
|w (DLC) 2014013307
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| 830 |
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0 |
|a Wiley series in materials for electronic and optoelectronic applications.
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| 856 |
4 |
0 |
|u https://doi.org/10.1002/9781118847510
|z Full Text via HEAL-Link
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| 994 |
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|a 92
|b DG1
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