Glancing angle deposition of thin films : engineering the nanoscale /

• Main Author: Hawkeye, Matthew M.
• Other Authors: Taschuk, Michael T., Brett, Michael J.
• Format: eBook
• Language: English
• Published: Chichester, West Sussex, United Kingdom : Wiley, [2014]
• Series: Wiley series in materials for electronic and optoelectronic applications.
• Subjects: Nanotechnology.; Chemical vapor deposition.; Nanoelectromechanical systems > Design and construction.; TECHNOLOGY & ENGINEERING / Mechanical; Electronic books.