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| LEADER |
01702nam a2200469 4500 |
| 001 |
ocn886656913 |
| 003 |
OCoLC |
| 005 |
20170124070204.6 |
| 006 |
m o d |
| 007 |
cr cnu|||unuuu |
| 008 |
140813s2014 gw obf 001 0 eng d |
| 040 |
|
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|a DG1
|b eng
|e rda
|e pn
|c DG1
|d YDXCP
|d OCLCQ
|d DEBBG
|d GrThAP
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| 019 |
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|a 900562790
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| 020 |
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|a 9783527670109
|q (electronic bk.)
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| 020 |
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|a 3527670106
|q (electronic bk.)
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| 024 |
7 |
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|a 10.1002/9783527670109
|2 doi
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| 029 |
1 |
|
|a CHBIS
|b 010442130
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| 029 |
1 |
|
|a CHVBK
|b 334083966
|
| 029 |
1 |
|
|a GBVCP
|b 799862703
|
| 029 |
1 |
|
|a NZ1
|b 15753508
|
| 029 |
1 |
|
|a NZ1
|b 15907019
|
| 029 |
1 |
|
|a DEBBG
|b BV043397040
|
| 035 |
|
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|a (OCoLC)886656913
|z (OCoLC)900562790
|
| 050 |
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4 |
|a TK7874.893
|
| 082 |
0 |
4 |
|a 621.3815
|2 23
|
| 049 |
|
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|a MAIN
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| 245 |
0 |
0 |
|a Handbook of 3D Integration :
|b 3D process technology /
|c edited by Philip Garrou, Mitsumasa Koyanagi, and Peter Ramm.
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| 264 |
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1 |
|a Weinheim, Germany :
|b Wiley-VCH,
|c 2014.
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| 300 |
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|a 1 online resource
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| 336 |
|
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|a text
|b txt
|2 rdacontent
|
| 337 |
|
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|a computer
|b c
|2 rdamedia
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| 338 |
|
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|a online resource
|b cr
|2 rdacarrier
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| 504 |
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|a Includes bibliographical references and index.
|
| 588 |
0 |
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|a Online resource; title from PDF title page (John Wiley, viewed Aug. 13, 2014).
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| 650 |
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0 |
|a Three-dimensional integrated circuits
|x Design and construction
|v Handbooks, manuals, etc.
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| 650 |
|
0 |
|a Three-dimensional imaging
|v Handbooks, manuals, etc.
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| 655 |
|
4 |
|a Electronic books.
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| 700 |
1 |
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|a Garrou, Philip E.,
|e editor.
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| 700 |
1 |
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|a Koyanagi, Mitsumasa,
|e editor.
|
| 700 |
1 |
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|a Ramm, Peter,
|e editor.
|
| 856 |
4 |
0 |
|u https://doi.org/10.1002/9783527670109
|z Full Text via HEAL-Link
|
| 994 |
|
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|a 92
|b DG1
|
