Handbook of 3D Integration : 3D process technology /

• Other Authors: Garrou, Philip E. (Editor), Koyanagi, Mitsumasa (Editor), Ramm, Peter (Editor)
• Format: eBook
• Language: English
• Published: Weinheim, Germany : Wiley-VCH, 2014.
• Subjects: Three-dimensional integrated circuits > Design and construction > Handbooks, manuals, etc.; Three-dimensional imaging > Handbooks, manuals, etc.; Electronic books.