Particle adhesion and removal /
| Άλλοι συγγραφείς: | , |
|---|---|
| Μορφή: | Ηλ. βιβλίο |
| Γλώσσα: | English |
| Έκδοση: |
Hoboken, New Jersey Salem, Massachusetts :
Wiley/Scrivener,
[2014]
|
| Σειρά: | Adhesion and adhesives.
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| Θέματα: | |
| Διαθέσιμο Online: | Full Text via HEAL-Link |
Πίνακας περιεχομένων:
- Half Title page; Title page; Copyright page; Preface; Acknowledgements; Part 1: Particle Adhesion: Fundamentals; Chapter 1: Fundamental Forces in Particle Adhesion; 1.1 Introduction; 1.2 Various Forces in Particle Adhesion; 1.3 Summary; References; Chapter 2: Mechanics of Particle Adhesion and Removal; 2.1 Introduction; 2.2 Models; 2.3 Simulations Results; 2.4 Summary and Conclusions; Acknowledgements; References; Chapter 3: Microscopic Particle Contact Adhesion Models and Macroscopic Behavior of Surface Modified Particles; 3.1 Introduction; 3.2 Constitutive Contact Models
- 3.3 Macroscopic Powder Behavior
- Continuum Mechanics Approach3.4 Surface Modification to Alter the Adhesion Properties; 3.5 Experimental Measurements of the Adhesion Forces; 3.6 Summary and Conclusions; Acknowledgements; List of Symbols; References; Chapter 4: Characterization of Single Particle Adhesion: A Review of Recent Progress; 4.1 Introduction; 4.2 Background; 4.3 Recent Developments; 4.4 Conclusions and Remarks; Acknowledgments; List of Symbols; References; Part 2: Particle Removal Techniques; Chapter 5: High Intensity Ultrasonic Cleaning for Particle Removal; 5.1 Introduction
- 5.2 Ultrasound and Ultrasonics5.3 Cavitation Phenomenon; 5.4 Generation of Ultrasound
- Transducers; 5.5 Ultrasonic Generators; 5.6 Principles of Ultrasonic Cleaning for Particle Removal; 5.7 Determination of Residual Particles on Surfaces; 5.8 Ultrasonic Aqueous Cleaning Equipment and Process; 5.9 Precision Cleaning; 5.10 Contaminants; 5.11 Ultrasonic Cavitation Forces and Surface Cleaning; 5.12 Cleaning Chemistry; 5.13 Mechanism of Cleaning; 5.14 Cavitation Erosion; 5.15 Summary; References; Chapter 6: Megasonic Cleaning for Particle Removal; 6.1 Introduction
- 6.2 Principles of Megasonic Cleaning6.3 Particle Removal Mechanisms During Megasonic Cleaning; 6.4 Types of Megasonic Systems; 6.5 Particle Removal and Feature Damage in Megasonic Cleaning; 6.6 Summary; References; Chapter 7: High Speed Air Jet Removal of Particles from Solid Surfaces; 7.1 Introduction; 7.2 Fundamental Characteristics of the Air Jet; 7.3 Fundamentals of Air Jet Particle Removal; 7.4 New Methods Using Air Jet; 7.5 Summary and Prospect; List of Symbols; References; Chapter 8: Droplet Spray Technique for Particle Removal; 8.1 Introduction; 8.2 Droplet Impact Phenomena
- 8.3 Cleaning Process Window8.4 Droplet Spray Technique for Semiconductor Wafer Cleaning; 8.5 Summary; References; Chapter 9: Laser-Induced High-Pressure Micro-Spray Process for Nanoscale Particle Removal; 9.1 Introduction; 9.2 Concept of Droplet Opto-Hydrodynamic Cleaning (DOC); 9.3 Micro-Spray Generation by LIB; 9.4 Mechanisms of Particle Removal by Laser-Induced Spray Jet; 9.5 Generation of Micro-Spray Jet; 9.6 Nanoscale Particle Removal; 9.7 Summary; References; Chapter 10: Wiper-Based Cleaning of Particles from Surfaces; 10.1 Introduction
