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Atomic layer deposition of nanostructured materials /
Published 2011
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Atomic layer deposition : principles, characteristics, and nanotechnology applications /
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Kääriäinen, Tommi
Published 2013
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CVD Polymers : fabrication of organic surfaces and devices /
Published 2015
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Glancing angle deposition of thin films : engineering the nanoscale /
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Hawkeye, Matthew M.
Published 2014
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