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Rare-Earth Implanted MOS Devices for Silicon Photonics Microstructural, Electrical and Optoelectronic Properties
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Rebohle
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Lars
Published 2010
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2
Flash Lamp Annealing From Basics to Applications /
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Rebohle
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Lars
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Rebohle
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Lars
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Prucnal, Slawomir
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Reichel, Denise
Published 2019
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Rare-Earth Implanted MOS Devices for Silicon Photonics Microstructural, Electrical and Optoelectronic Properties /
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Rebohle
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Lars
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Skorupa, Wolfgang
Published 2010
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Optical and Electronic Materials
Optical materials
Electronic materials
Materials Science
Lasers
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Materials science
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Microwaves, RF and Optical Engineering
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Nanotechnology and Microengineering
Optical engineering
Optics, Lasers, Photonics, Optical Devices
Photonics
Semiconductors
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