Multicomponent and multilayered thin films for advanced microtechnologies : techniques, fundamentals, and devices /

• Corporate Author: NATO Advanced Study Institute on Multicomponent and Multilayered Thin Films for Advanced Microtechnologies Bad Windsheim, Germany
• Other Authors: Auciello, Orlando, 1945- (επιμελητής.), Engemann, Jurgen (επιμελητής.)
• Format: Conference Proceeding Book
• Language: English
• Published: Dordrecht : Kluwer Academic Publishers, 1993.
• Series: NATO ASI series Applied sciences 234.
• Subjects: Ηλεκτρονικά κυκλώματα