Fundamentals of microelectronics processing

• Main Author: Lee, Hong H.
• Format: Book
• Language: English
• Published: New York McGraw - Hill Book Company 1990
• Series: McGraw - Hill chemical engineering series
• Subjects: Ηλεκτρονικά; Ηλεκτρικά κυκλώματα; Μικροηλεκτρονική
• Physical Description: xvi, 514 p. fig., tab. 23,5 cm
• ISBN: 0071007962