Process engineering analysis in semiconductor device fabrication

• Main Author: Middleman, Stanley
• Other Authors: Hochberg, Arthur K.
• Format: Book
• Language: English
• Published: New York McGraw - Hill 1993
• Series: McGraw - Hill chemical engineering series
• Subjects: Ηλεκτρονικά
• Physical Description: xvii, 774 p. fig., tab. 23 cm
• ISBN: 0071127445