APA (7th ed.) Citation

Campbell, S. A., & Lewerenz, H. J. (1998). Semiconductor micromachining. Wiley.

Chicago Style (17th ed.) Citation

Campbell, S. A., and H. J. Lewerenz. Semiconductor Micromachining. Chichester: Wiley, 1998.

MLA (8th ed.) Citation

Campbell, S. A., and H. J. Lewerenz. Semiconductor Micromachining. Wiley, 1998.

Warning: These citations may not always be 100% accurate.