Semiconductor micromachining

• Other Authors: Campbell, S. A. (Editor), Lewerenz, H. J. (Editor)
• Format: Book
• Language: English
• Published: Chichester Wiley 1998
• Subjects: Ημιαγωγοί; Ημιαγωγοί > Ιδιότητες; Μικροηλεκτρονική
• Physical Description: 2 v. fig., tab. 24 cm.
• Bibliography: Includes bibliographical references and index
• ISBN: 0471966819; 0471966827; 0471980846