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|a eng
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|a 621.381 52
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| 245 |
1 |
0 |
|a Semiconductor micromachining
|c edited by S. A. Campbell, H. J. Lewerenz
|
| 260 |
|
|
|a Chichester
|b Wiley
|c 1998
|
| 300 |
|
|
|a 2 v.
|b fig., tab.
|c 24 cm.
|
| 504 |
|
|
|a Includes bibliographical references and index
|
| 505 |
1 |
|
|a v.1. Fundamental electrochemistry and physics. - xii, 315 p. --
|a v.2. Techniques and industrial applications. - xii, 389 p.
|
| 650 |
|
4 |
|a Ημιαγωγοί
|9 722
|
| 650 |
|
4 |
|a Ημιαγωγοί
|x Ιδιότητες
|9 723
|
| 650 |
|
4 |
|a Μικροηλεκτρονική
|9 724
|
| 700 |
1 |
|
|a Campbell, S. A.
|4 edt
|9 725
|
| 700 |
1 |
|
|a Lewerenz, H. J.
|4 edt
|9 726
|
| 852 |
|
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|c ΔΡΑΚΟΠΟΥΛΟΥ
|d 2000-02
|
| 999 |
|
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|c 246
|d 246
|
