Semiconductor micromachining

• Other Authors: Campbell, S. A. (Editor), Lewerenz, H. J. (Editor)
• Format: Book
• Language: English
• Published: Chichester Wiley 1998
• Subjects: Ημιαγωγοί; Ημιαγωγοί > Ιδιότητες; Μικροηλεκτρονική

Table of Contents:

• v.1. Fundamental electrochemistry and physics. - xii, 315 p.
• v.2. Techniques and industrial applications. - xii, 389 p.