Nanotechnology integrated processing systems for ultra-precision and ultra-fine products

• Other Authors: Taniguchi, Norio 1912-
• Format: Book
• Language: English
• Published: Oxford New York Oxford University Press 1996
• Series: Oxford science publications
• Subjects: Νανοτεχνολογία; Τεχνολογία > Υλικά
• Physical Description: xiv, 406 p. ill. 26 cm.
• Bibliography: Includes bibliographical references and index
• ISBN: 0198562837