Piezoelectric Multilayer Beam Bending Actuators Static and Dynamic Behavior and Aspects of Sensor Integration

• Main Author: Ballas, Rodiger G.
• Format: Electronic Kit Book
• Language: English
• Published: Berlin, Heidelberg Springer-Verlag Berlin Heidelberg 2007
• Series: Microtechnology and Mems
• Subjects: Engineering; Electronics; Physics; Structural control (Engineering); Mechanics, applied; Optical materials; Electronics and Microelectronics, Instrumentation; Complexity; Control Engineering; Theoretical and Applied Mechanics; Optical and Electronic Materials