Shape and Functional Elements of the Bulk Silicon Microtechnique A Manual of Wet-Etched Silicon Structures

• Κύριος συγγραφέας: FrΓΌhauf, Joachim
• Μορφή: Ηλεκτρονική πηγή Εργαλειοθήκη Βιβλίο
• Γλώσσα: English
• Έκδοση: Berlin, Heidelberg Springer-Verlag Berlin Heidelberg 2005
• Θέματα: Optical materials; Microwaves; Electronics; Chemical engineering; Chemistry; Optical and Electronic Materials; Ceramics, Glass, Composites, Natural Methods; Microwaves, RF and Optical Engineering; Electronics and Microelectronics, Instrumentation; Industrial Chemistry/Chemical Engineering