FrΓΌhauf, J. (2005). Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures. Springer-Verlag Berlin Heidelberg.
Chicago Style (17th ed.) CitationFrΓΌhauf, Joachim. Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures. Berlin, Heidelberg: Springer-Verlag Berlin Heidelberg, 2005.
MLA (8th ed.) CitationFrΓΌhauf, Joachim. Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures. Springer-Verlag Berlin Heidelberg, 2005.
Warning: These citations may not always be 100% accurate.
