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| LEADER |
01304nom a2200337 u 4500 |
| 001 |
10070523 |
| 003 |
upatras |
| 005 |
20210117201617.0 |
| 008 |
090513s2005 eng |
| 020 |
|
|
|a 9783540268765
|
| 040 |
|
|
|a GR-PaULI
|c GR-PaULI
|
| 041 |
0 |
|
|a eng
|
| 100 |
1 |
|
|a FrΓΌhauf, Joachim
|9 66843
|
| 245 |
1 |
0 |
|a Shape and Functional Elements of the Bulk Silicon Microtechnique
|h [electronic resource]
|b A Manual of Wet-Etched Silicon Structures
|c by Joachim FrΓΌhauf
|
| 260 |
|
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|a Berlin, Heidelberg
|b Springer-Verlag Berlin Heidelberg
|c 2005
|
| 300 |
|
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|b v.: digital
|
| 650 |
|
4 |
|a Optical materials
|9 64444
|
| 650 |
|
4 |
|a Microwaves
|9 64528
|
| 650 |
|
4 |
|a Electronics
|9 15695
|
| 650 |
|
4 |
|a Chemical engineering
|9 64414
|
| 650 |
|
4 |
|a Chemistry
|9 11013
|
| 650 |
|
4 |
|a Optical and Electronic Materials
|9 64446
|
| 650 |
|
4 |
|a Ceramics, Glass, Composites, Natural Methods
|9 65645
|
| 650 |
|
4 |
|a Microwaves, RF and Optical Engineering
|9 64530
|
| 650 |
|
4 |
|a Electronics and Microelectronics, Instrumentation
|9 64430
|
| 650 |
|
4 |
|a Industrial Chemistry/Chemical Engineering
|9 64417
|
| 852 |
|
|
|a GR-PaULI
|b ΠΑΤΡΑ
|b ΒΚΠ
|
| 856 |
4 |
0 |
|u http://dx.doi.org/10.1007/b138230
|
| 942 |
|
|
|2 ddc
|
| 952 |
|
|
|0 0
|1 0
|4 0
|7 0
|9 71978
|a LISP
|b LISP
|d 2016-04-24
|l 0
|r 2016-04-24 00:00:00
|w 2016-04-24
|y ERS
|
| 999 |
|
|
|c 46768
|d 46768
|
