Shape and Functional Elements of the Bulk Silicon Microtechnique A Manual of Wet-Etched Silicon Structures

Shape and Functional Elements of the Bulk Silicon Microtechnique A Manual of Wet-Etched Silicon Structures

Λεπτομέρειες βιβλιογραφικής εγγραφής
Κύριος συγγραφέας:	FrΓΌhauf, Joachim
Μορφή:	Ηλεκτρονική πηγή Εργαλειοθήκη Βιβλίο
Γλώσσα:	English
Έκδοση:	Berlin, Heidelberg Springer-Verlag Berlin Heidelberg 2005
Θέματα:	Optical materials Microwaves Electronics Chemical engineering Chemistry Optical and Electronic Materials Ceramics, Glass, Composites, Natural Methods Microwaves, RF and Optical Engineering Electronics and Microelectronics, Instrumentation Industrial Chemistry/Chemical Engineering
Διαθέσιμο Online:	http://dx.doi.org/10.1007/b138230

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