Shape and Functional Elements of the Bulk Silicon Microtechnique A Manual of Wet-Etched Silicon Structures

• Main Author: FrΓΌhauf, Joachim
• Format: Electronic Kit Book
• Language: English
• Published: Berlin, Heidelberg Springer-Verlag Berlin Heidelberg 2005
• Subjects: Optical materials; Microwaves; Electronics; Chemical engineering; Chemistry; Optical and Electronic Materials; Ceramics, Glass, Composites, Natural Methods; Microwaves, RF and Optical Engineering; Electronics and Microelectronics, Instrumentation; Industrial Chemistry/Chemical Engineering