Integrated Chemical Microsensor Systems in CMOS Technology

• Main Author: Hierlemann, Andreas
• Other Authors: Baltes, H., Fujita, Hiroyuki, Liepmann, Dorian
• Format: Electronic Kit Book
• Language: English
• Published: Berlin, Heidelberg Springer-Verlag Berlin Heidelberg 2005
• Series: Microtechnology and MEMS
• Subjects: Optical materials; Nanotechnology; Surfaces (Physics); Electronics; Analytical biochemistry; Μέτρα και σταθμά; Chemistry; Optical and Electronic Materials; Surfaces and Interfaces, Thin Films; Electronics and Microelectronics, Instrumentation; Analytical Chemistry; Γεωδαισία