Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration

• Κύριος συγγραφέας: Laconte, J.
• Άλλοι συγγραφείς: Flandre, D., Raskin, J. -P
• Μορφή: Ηλεκτρονική πηγή Εργαλειοθήκη Βιβλίο
• Γλώσσα: English
• Έκδοση: Boston, MA Springer 2006
• Θέματα: Engineering; Surfaces (Physics); Electronics; Physical optics; Systems engineering; Particles (Nuclear physics); Surfaces and Interfaces, Thin Films; Electronics and Microelectronics, Instrumentation; Physics and Applied Physics in Engineering; Applied Optics, Optoelectronics, Optical Devices; Circuits and Systems; Solid State Physics and Spectroscopy