Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration

• Main Author: Laconte, J.
• Other Authors: Flandre, D., Raskin, J. -P
• Format: Electronic Kit Book
• Language: English
• Published: Boston, MA Springer 2006
• Subjects: Engineering; Surfaces (Physics); Electronics; Physical optics; Systems engineering; Particles (Nuclear physics); Surfaces and Interfaces, Thin Films; Electronics and Microelectronics, Instrumentation; Physics and Applied Physics in Engineering; Applied Optics, Optoelectronics, Optical Devices; Circuits and Systems; Solid State Physics and Spectroscopy