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Defects in High-k Gate Dielectric Stacks Nano-Electronic Semiconductor Devices

Defects in High-k Gate Dielectric Stacks Nano-Electronic Semiconductor Devices

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Bibliographic Details
Main Author: Gusev, Evgeni
Format: Electronic Kit Book
Language:English
Published: Dordrecht Springer 2006
Series:NATO Science Series II: Mathematics, Physics and Chemistry 220
Subjects:
Engineering
Computer engineering
Electronics
Condensed matter
Electronic and Computer Engineering
Electronics and Microelectronics, Instrumentation
Physics and Applied Physics in Engineering
Condensed Matter
Online Access:http://dx.doi.org/10.1007/1-4020-4367-8
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Description
Physical Description:v.: digital
ISBN:9781402043673
ISSN:1568-2609

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