Micromechanical Photonics
Main Author: | Ukita, Hiroo |
---|---|
Format: | Electronic Kit Book |
Language: | English |
Published: |
Berlin, Heidelberg
Springer-Verlag Berlin Heidelberg
2006
|
Series: | Microtechnology and Mems
|
Subjects: | |
Online Access: | http://dx.doi.org/10.1007/978-3-540-31372-4 |
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