Principles of physical vapor deposition of thin films
The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in technology. Principles of Vapor Deposition of Thin Films brings in to one place a diverse amount of scientific background that is considered...
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| Format: | Electronic Book |
| Language: | English |
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Amsterdam Boston London
Elsevier
2006
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| Edition: | 1st ed |
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| Online Access: | An electronic book accessible through the World Wide Web; click for information An electronic book accessible through the World Wide Web; click for information Publisher description |