Principles of physical vapor deposition of thin films
The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in technology. Principles of Vapor Deposition of Thin Films brings in to one place a diverse amount of scientific background that is considered...
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| Format: | Electronic Book |
| Language: | English |
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Amsterdam Boston London
Elsevier
2006
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| Edition: | 1st ed |
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| Online Access: | An electronic book accessible through the World Wide Web; click for information An electronic book accessible through the World Wide Web; click for information Publisher description |
| Summary: | The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in technology. Principles of Vapor Deposition of Thin Films brings in to one place a diverse amount of scientific background that is considered essential to become knowledgeable in thin film depostition techniques. Its ultimate goal as a reference is to provide the foundation upon which thin film science and technological innovation are possible. * Offers detailed derivation of important formulae. * Thoroughly covers the basic principles of materials science that are important to any thin film preparation. * Careful attention to terminologies, concepts and definitions, as well as abundance of illustrations offer clear support for the text |
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| Physical Description: | xi, 1160 σ. εικ. 25 εκ |
| Bibliography: | Περιέχει βιβλιογραφικές παραπομπές και ευρετήριο |
| ISBN: | 9780080446998 008044699X |
