Principles of physical vapor deposition of thin films

The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in technology. Principles of Vapor Deposition of Thin Films brings in to one place a diverse amount of scientific background that is considered...

Πλήρης περιγραφή

Λεπτομέρειες βιβλιογραφικής εγγραφής
Κύριος συγγραφέας: SreeHarsha, K. S
Συγγραφή απο Οργανισμό/Αρχή: ScienceDirect (Online service)
Μορφή: Ηλεκτρονική πηγή Βιβλίο
Γλώσσα:English
Έκδοση: Amsterdam Boston London Elsevier 2006
Έκδοση:1st ed
Θέματα:
Διαθέσιμο Online:An electronic book accessible through the World Wide Web; click for information
An electronic book accessible through the World Wide Web; click for information
Publisher description
LEADER 02487nam a2200373 u 4500
001 10074823
003 upatras
005 20210428124522.0
008 090520s2006 eng
020 |a 9780080446998 
020 |a 008044699X 
040 |a GR-PaULI  |c GR-PaULI 
041 0 |a eng 
050 4 |a QC176.83  |b .S68 2006eb 
082 1 4 |a 621.38152  |2 22 
100 1 |a SreeHarsha, K. S  |9 74267 
245 1 0 |a Principles of physical vapor deposition of thin films  |h [electronic resource]  |c K.S. Sree Harsha 
250 |a 1st ed 
260 |a Amsterdam  |a Boston  |a London  |b Elsevier  |c 2006 
300 |a xi, 1160 σ.  |b εικ.  |c 25 εκ 
504 |a Περιέχει βιβλιογραφικές παραπομπές και ευρετήριο 
520 |a The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in technology. Principles of Vapor Deposition of Thin Films brings in to one place a diverse amount of scientific background that is considered essential to become knowledgeable in thin film depostition techniques. Its ultimate goal as a reference is to provide the foundation upon which thin film science and technological innovation are possible. * Offers detailed derivation of important formulae. * Thoroughly covers the basic principles of materials science that are important to any thin film preparation. * Careful attention to terminologies, concepts and definitions, as well as abundance of illustrations offer clear support for the text 
650 4 |a Λεπτές μεμβράνες   |9 74269 
650 4 |a Ατμός  |9 74268 
650 4 |a Λεπτές μεμβράνες   |9 74269 
650 4 |a Depot en phase vapeur  |9 74270 
710 2 |a ScienceDirect (Online service)  |9 35187 
852 |a GR-PaULI  |b ΠΑΤΡΑ  |b ΒΚΠ  |h 621.38152 SRE 
856 4 0 |3 ScienceDirect  |u http://www.sciencedirect.com/science/book/9780080446998  |z An electronic book accessible through the World Wide Web; click for information 
856 4 0 |3 Referex  |u http://www.engineeringvillage.com/controller/servlet/OpenURL?genre=book&isbn=9780080446998  |z An electronic book accessible through the World Wide Web; click for information 
856 4 2 |3 Publisher description  |u http://www.loc.gov/catdir/enhancements/fy0664/2005937842-d.html 
942 |2 ddc 
999 |c 50690  |d 50690 
952 |0 0  |1 0  |4 0  |6 621_381520000000000_SRE  |7 0  |9 75922  |a LISP  |b LISP  |d 2016-04-24  |l 0  |o 621.38152 SRE  |r 2016-04-24  |w 2016-04-24  |y ERS