Principles of physical vapor deposition of thin films
The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in technology. Principles of Vapor Deposition of Thin Films brings in to one place a diverse amount of scientific background that is considered...
Κύριος συγγραφέας: | |
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Συγγραφή απο Οργανισμό/Αρχή: | |
Μορφή: | Ηλεκτρονική πηγή Βιβλίο |
Γλώσσα: | English |
Έκδοση: |
Amsterdam Boston London
Elsevier
2006
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Έκδοση: | 1st ed |
Θέματα: | |
Διαθέσιμο Online: | An electronic book accessible through the World Wide Web; click for information An electronic book accessible through the World Wide Web; click for information Publisher description |
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020 | |a 008044699X | ||
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100 | 1 | |a SreeHarsha, K. S |9 74267 | |
245 | 1 | 0 | |a Principles of physical vapor deposition of thin films |h [electronic resource] |c K.S. Sree Harsha |
250 | |a 1st ed | ||
260 | |a Amsterdam |a Boston |a London |b Elsevier |c 2006 | ||
300 | |a xi, 1160 σ. |b εικ. |c 25 εκ | ||
504 | |a Περιέχει βιβλιογραφικές παραπομπές και ευρετήριο | ||
520 | |a The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in technology. Principles of Vapor Deposition of Thin Films brings in to one place a diverse amount of scientific background that is considered essential to become knowledgeable in thin film depostition techniques. Its ultimate goal as a reference is to provide the foundation upon which thin film science and technological innovation are possible. * Offers detailed derivation of important formulae. * Thoroughly covers the basic principles of materials science that are important to any thin film preparation. * Careful attention to terminologies, concepts and definitions, as well as abundance of illustrations offer clear support for the text | ||
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650 | 4 | |a Λεπτές μεμβράνες |9 74269 | |
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856 | 4 | 0 | |3 ScienceDirect |u http://www.sciencedirect.com/science/book/9780080446998 |z An electronic book accessible through the World Wide Web; click for information |
856 | 4 | 0 | |3 Referex |u http://www.engineeringvillage.com/controller/servlet/OpenURL?genre=book&isbn=9780080446998 |z An electronic book accessible through the World Wide Web; click for information |
856 | 4 | 2 | |3 Publisher description |u http://www.loc.gov/catdir/enhancements/fy0664/2005937842-d.html |
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