Principles of physical vapor deposition of thin films
The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in technology. Principles of Vapor Deposition of Thin Films brings in to one place a diverse amount of scientific background that is considered...
Main Author: | SreeHarsha, K. S |
---|---|
Corporate Author: | ScienceDirect (Online service) |
Format: | Electronic Book |
Language: | English |
Published: |
Amsterdam Boston London
Elsevier
2006
|
Edition: | 1st ed |
Subjects: | |
Online Access: | An electronic book accessible through the World Wide Web; click for information An electronic book accessible through the World Wide Web; click for information Publisher description |
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