Principles of physical vapor deposition of thin films

The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in technology. Principles of Vapor Deposition of Thin Films brings in to one place a diverse amount of scientific background that is considered...

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Bibliographic Details
Main Author: SreeHarsha, K. S
Corporate Author: ScienceDirect (Online service)
Format: Electronic Book
Language:English
Published: Amsterdam Boston London Elsevier 2006
Edition:1st ed
Subjects:
Online Access:An electronic book accessible through the World Wide Web; click for information
An electronic book accessible through the World Wide Web; click for information
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