Analysis and design principles of MEMS devices
Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS dev...
Κύριος συγγραφέας: | Bao, Min-Hang |
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Συγγραφή απο Οργανισμό/Αρχή: | ScienceDirect (Online service) |
Μορφή: | Ηλεκτρονική πηγή Βιβλίο |
Γλώσσα: | English |
Έκδοση: |
Amsterdam Boston London
Elsevier
2005
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Θέματα: | |
Διαθέσιμο Online: | An electronic book accessible through the World Wide Web; click for information An electronic book accessible through the World Wide Web; click for information |
Παρόμοια τεκμήρια
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Analysis of microelectronic materials and devices
Έκδοση: (1991) -
Microelectronic devices
ανά: Leaver, K. D.
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Microsystem engineering of lab-on-a-chip devices
ανά: Geschke, Oliver
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The VLSI designer's library : nMOS, λ =2.5 [μ], with butting contacts /
ανά: Newkirk, John A.
Έκδοση: (1983) -
CMOS devices 1987 source book
Έκδοση: (1987)