Analysis and design principles of MEMS devices
Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS dev...
| Κύριος συγγραφέας: | |
|---|---|
| Συγγραφή απο Οργανισμό/Αρχή: | |
| Μορφή: | Ηλεκτρονική πηγή Βιβλίο |
| Γλώσσα: | English |
| Έκδοση: |
Amsterdam Boston London
Elsevier
2005
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| Θέματα: | |
| Διαθέσιμο Online: | An electronic book accessible through the World Wide Web; click for information An electronic book accessible through the World Wide Web; click for information |
Πίνακας περιεχομένων:
- Chapter 1. Introduction to MEMS devices
- Chapter 2. Basic mechanics of beam and diaphragm structures
- Chapter 3. Air Damping
- Chapter 4. Electrostatic Actuation
- Chapter 5. Capacitive Sensing and Effects of Electrical Excitation
- Chapter 6. Piezoresistive Sensing
