Surfaces and their measurement
The importance of surface metrology has long been acknowledged in manufacturing and mechanical engineering, but has now gained growing recognition in an expanding number of new applications in fields such as semiconductors, electronics and optics. Metrology is the scientific study of measurement, an...
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| Format: | Electronic Book |
| Language: | English |
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London
HPS
2002
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| Online Access: | An electronic book accessible through the World Wide Web; click for information An electronic book accessible through the World Wide Web; click for information |
Table of Contents:
- 1. What is surface metrology? 2. Measurement of surfaces. 3. Profile parameter characterisation. 4. Surfaces in manufacture. 5. Function and surface texture. 6. Surface finish instrumentation. 7. Stylus instruments. 8. Optical methods. 9. Scanning microscopes. 10. Errors of form. 11. Roundness and related subjects. 12. Cylindricity, sphericity etc. 13. Instrument design for minimum error. 14. Calibration of instruments. 15. Sampling, numerical analysis, display. Glossary
