Surfaces and their measurement

• Main Author: Whitehouse, D. J ((David J.))
• Corporate Author: ScienceDirect (Online service)
• Format: Electronic Book
• Language: English
• Published: London HPS 2002
• Subjects: Επιστήμη επιφανειών

The importance of surface metrology has long been acknowledged in manufacturing and mechanical engineering, but has now gained growing recognition in an expanding number of new applications in fields such as semiconductors, electronics and optics. Metrology is the scientific study of measurement, an...