Semiconductors for micro- and nanotechnology an introduction for engineers

• Main Author: Korvink, J. G ((Jan G.))
• Other Authors: Greiner, Andreas
• Format: Electronic Book
• Language: English
• Published: Weinheim Wiley-VCH c2002
• Subjects: Ημιαγωγοί; Νανοτεχνολογία; Μικροτεχνολογία