Laser Precision Microfabrication
Main Author: | Sugioka, Koji |
---|---|
Corporate Author: | SpringerLink (Online service) |
Other Authors: | Meunier, Michel, PiquΓ©, Alberto |
Format: | Electronic Kit Book |
Language: | English |
Published: |
Berlin, Heidelberg
Springer-Verlag Berlin Heidelberg
2010
|
Series: | Springer Series in Materials Science
135 |
Subjects: | |
Online Access: | http://dx.doi.org/10.1007/978-3-642-10523-4 |
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