Rare-Earth Implanted MOS Devices for Silicon Photonics Microstructural, Electrical and Optoelectronic Properties
| Main Author: | |
|---|---|
| Corporate Author: | |
| Other Authors: | |
| Format: | Electronic Kit Book |
| Language: | English |
| Published: |
Berlin, Heidelberg
Springer-Verlag Berlin Heidelberg
2010
|
| Series: | Springer Series in Materials Science
142 |
| Subjects: | |
| Online Access: | http://dx.doi.org/10.1007/978-3-642-14447-9 |
