Electron Kinetics and Applications of Glow Discharges
This book resulted from the NATO Advanced Research Workshop on “Electron Kinetics and Applications of Glow Discharges,” held in St. Petersburg, Russia, on May 19-23, 1997. Glow discharges have found widespread applications in many technological processes from the manufacture of semiconductors, to re...
| Συγγραφή απο Οργανισμό/Αρχή: | |
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| Άλλοι συγγραφείς: | , |
| Μορφή: | Ηλεκτρονική πηγή Ηλ. βιβλίο |
| Γλώσσα: | English |
| Έκδοση: |
Boston, MA :
Springer US,
1998.
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| Σειρά: | NATO Science Series: B, Advanced Science Institutes Series,
367 |
| Θέματα: | |
| Διαθέσιμο Online: | Full Text via HEAL-Link |
