Mechanics of Microelectromechanical Systems
This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer’s viewpoint as devices that transform an input form of energy, such as thermal, electrostatic, electromagnetic or optical, into output mechanical motion...
Κύριοι συγγραφείς: | , |
---|---|
Συγγραφή απο Οργανισμό/Αρχή: | |
Μορφή: | Ηλεκτρονική πηγή Ηλ. βιβλίο |
Γλώσσα: | English |
Έκδοση: |
Boston, MA :
Springer US,
2005.
|
Θέματα: | |
Διαθέσιμο Online: | Full Text via HEAL-Link |
Πίνακας περιεχομένων:
- Stiffness Basics
- Microcantilevers, Microhinges, Microbridges
- Microsuspensions
- Microtransduction: Actuation and Sensing
- Static Response of Mems
- Microfabrication, Materials, Precision and Scaling.