Mechanics of Microelectromechanical Systems

• Main Authors: Lobontiu, Nicolae (Author), Garcia, Ephrahim (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Boston, MA : Springer US, 2005.
• Subjects: Engineering.; Mechanical engineering.; Mechanical Engineering.

This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer’s viewpoint as devices that transform an input form of energy, such as thermal, electrostatic, electromagnetic or optical, into output mechanical motion...

Table of Contents:

• Stiffness Basics
• Microcantilevers, Microhinges, Microbridges
• Microsuspensions
• Microtransduction: Actuation and Sensing
• Static Response of Mems
• Microfabrication, Materials, Precision and Scaling.