Fundamentals of Nanoscale Film Analysis

• Main Authors: Alford, Terry L. (Author), Feldman, Leonard C. (Author), Mayer, James W. (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Boston, MA : Springer US, 2007.
• Subjects: Materials science.; Condensed matter.; Solid state physics.; Spectroscopy.; Microscopy.; Nanotechnology.; Materials > Surfaces.; Thin films.; Materials Science.; Characterization and Evaluation of Materials.; Surfaces and Interfaces, Thin Films.; Solid State Physics.; Spectroscopy and Microscopy.; Condensed Matter Physics.

Modern science and technology, from materials science to integrated circuit development, is directed toward the nanoscale. From thin films to field effect transistors, the emphasis is on reducing dimensions from the micro to the nanoscale. Fundamentals of Nanoscale Film Analysis concentrates on anal...