MEMS Materials and Processes Handbook

• Corporate Author: SpringerLink (Online service)
• Other Authors: Ghodssi, Reza (Editor), Lin, Pinyen (Editor)
• Format: Electronic eBook
• Language: English
• Published: Boston, MA : Springer US : Imprint: Springer, 2011.
• Series: MEMS Reference Shelf, 1
• Subjects: Engineering.; Electronics.; Microelectronics.; Electronic circuits.; Materials science.; Materials > Surfaces.; Thin films.; Electronics and Microelectronics, Instrumentation.; Materials Science, general.; Circuits and Systems.; Surfaces and Interfaces, Thin Films.

MEMS Materials and Processes Handbook is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on 'Materials' and 'Processes'. The...