APA (7th ed.) Citation

SpringerLink (Online service), Ghodssi, R., & Lin, P. (2011). MEMS Materials and Processes Handbook. Springer US : Imprint: Springer.

Chicago Style (17th ed.) Citation

SpringerLink (Online service), Reza Ghodssi, and Pinyen Lin. MEMS Materials and Processes Handbook. Boston, MA: Springer US : Imprint: Springer, 2011.

MLA (8th ed.) Citation

SpringerLink (Online service), et al. MEMS Materials and Processes Handbook. Springer US : Imprint: Springer, 2011.

Warning: These citations may not always be 100% accurate.