Design for Manufacturability and Yield for Nano-Scale CMOS

• Main Authors: Chiang, Charles C. (Author), Kawa, Jamil (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Dordrecht : Springer Netherlands, 2007.
• Series: Series on Integrated Circuits and Systems,
• Subjects: Engineering.; Microprocessors.; Software engineering.; Computer-aided engineering.; Electronics.; Microelectronics.; Electronic circuits.; Nanotechnology.; Circuits and Systems.; Electronics and Microelectronics, Instrumentation.; Computer-Aided Engineering (CAD, CAE) and Design.; Processor Architectures.; Software Engineering/Programming and Operating Systems.

As we approach the 32 nm CMOS technology node the design and manufacturing communities are dealing with a lithography system that has to print circuit artifacts that are significantly less than half the wavelength of the light source used, with new materials, with tighter pitches, and higher aspect...