Metal-Dielectric Interfaces in Gigascale Electronics Thermal and Electrical Stability /
Metal-dielectric interfaces are ubiquitous in modern electronics. As advanced gigascale electronic devices continue to shrink, the stability of these interfaces is becoming an increasingly important issue that has a profound impact on the operational reliability of these devices. In this book, the a...
Κύριοι συγγραφείς: | , |
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Συγγραφή απο Οργανισμό/Αρχή: | |
Μορφή: | Ηλεκτρονική πηγή Ηλ. βιβλίο |
Γλώσσα: | English |
Έκδοση: |
New York, NY :
Springer New York,
2012.
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Σειρά: | Springer Series in Materials Science,
157 |
Θέματα: | |
Διαθέσιμο Online: | Full Text via HEAL-Link |
Πίνακας περιεχομένων:
- Preface
- 1. Introduction
- 2. Metal-Dielectric Diffusion Processes: Fundamentals
- 3. Experimental Techniques
- 4. Al-Dielectric Interfaces
- 5. Cu-Dielectric Interfaces
- 6. Barrier Metal-Dielectric Interfaces
- 7. Self-Forming Barriers. 8. Kinetics of Ion Drift
- 9. Time-Dependent Dielectric Breakdown (TDDB) and Future Directions.