Helium Ion Microscopy Principles and Applications /
Helium Ion Microscopy: Principles and Applications describes the theory and discusses the practical details of why scanning microscopes using beams of light ions – such as the Helium Ion Microscope (HIM) – are destined to become the imaging tools of choice for the 21st century. Topics covered includ...
Κύριος συγγραφέας: | |
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Συγγραφή απο Οργανισμό/Αρχή: | |
Μορφή: | Ηλεκτρονική πηγή Ηλ. βιβλίο |
Γλώσσα: | English |
Έκδοση: |
New York, NY :
Springer New York : Imprint: Springer,
2013.
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Σειρά: | SpringerBriefs in Materials,
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Θέματα: | |
Διαθέσιμο Online: | Full Text via HEAL-Link |
Πίνακας περιεχομένων:
- Chapter 1: Introduction to Helium Ion Microscopy
- Chapter 2: Microscopy with Ions - A brief history
- Chapter 3: Operating the Helium Ion Microscope
- Chapter 4: Ion –Solid Interactions and Image Formation
- Chapter 5: Charging and Damage
- Chapter 6: Microanalysis with the HIM
- Chapter 7: Ion Generated Damage
- Chapter 8: Working with other Ion beams
- Chapter 9: Patterning and Nanofabrication
- Conclusion
- Bibliography
- Appendix: iSE Yields, and IONiSE parameters for He+ excitation of Elements and Compounds
- Index.