Helium Ion Microscopy Principles and Applications /

• Main Author: Joy, David C. (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: New York, NY : Springer New York : Imprint: Springer, 2013.
• Series: SpringerBriefs in Materials,
• Subjects: Materials science.; Spectroscopy.; Nanoscale science.; Nanoscience.; Nanostructures.; Microscopy.; Nanotechnology.; Materials Science.; Characterization and Evaluation of Materials.; Spectroscopy and Microscopy.; Spectroscopy/Spectrometry.; Nanoscale Science and Technology.

Helium Ion Microscopy: Principles and Applications describes the theory and discusses the practical details of why scanning microscopes using beams of light ions – such as the Helium Ion Microscope (HIM) – are destined to become the imaging tools of choice for the 21st century. Topics covered includ...

Table of Contents:

• Chapter 1: Introduction to Helium Ion Microscopy
• Chapter 2: Microscopy with Ions  - A brief history
• Chapter 3: Operating the Helium Ion Microscope
• Chapter 4: Ion –Solid  Interactions  and Image Formation
• Chapter 5: Charging and  Damage
• Chapter 6: Microanalysis with the HIM
• Chapter 7: Ion Generated Damage
• Chapter 8: Working with other Ion beams
• Chapter 9: Patterning and Nanofabrication
• Conclusion
• Bibliography
• Appendix: iSE Yields,  and IONiSE  parameters for  He+ excitation  of Elements and Compounds
• Index.