Chemical Vapour Deposition An Integrated Engineering Design for Advanced Materials /

• Κύριοι συγγραφείς: Xu, Yongdong (Συγγραφέας), Yan, Xiu-Tian (Συγγραφέας)
• Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
• Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
• Γλώσσα: English
• Έκδοση: London : Springer London, 2010.
• Σειρά: Engineering Materials and Processes,
• Θέματα: Engineering.; Industrial engineering.; Materials science.; Operating Procedures, Materials Treatment.; Materials Science, general.

The rapid advancement in chemical vapour deposition (CVD) technology has reached many fields of application, including thin film coating, microelectronics and communications. Chemical Vapour Deposition: An Integrated Engineering Design for Advanced Materials focuses on the application of this techno...

Πίνακας περιεχομένων:

• to Chemical Vapour Deposition
• Physical Fundamentals of Chemical Vapour Deposition
• Chemical Vapour Deposition Systems Design
• Thermodynamics and Kinetics of Chemical Vapour Deposition
• Chemical Vapour Infiltration
• Microstructure Evolution and Process Control.